Focus Adjustment System of Laser Probe for Radio Frequency Surface and Bulk Acoustic Wave Devices

Abstract

In this paper, we describe a focus adjustment system designed especially for a fast-mechanical-scanning laser probe for radio-frequency surface and bulk acoustic wave devices. When high spatial resolution is necessary for the observation, one needs an objective lens of large magnifying power with extremely shallow focal depth. Then, a small inclination of a measurement device may cause severe defocus resulting in blurred images. We installed the focus adjustment system in the laser probe, and showed that even with inclination, high-quality information of the wave field can be acquired without reducing the scanning speed.