Abstract
A new active slider structure is proposed for the flying height adjustment. A bulk PZT ceramic is bonded onto the backside of slider directly. The PZT actuator adjusts the flying height by control of air bearing surface profile. The total thickness of the active slider is same as a standard pico slider. This structure is easy to fabricate and compatible with standard product, it also keeps the air bearing surface intact. The thicknesses of the PZT and the glue are optimized with numerical simulations. This active slider has been demonstrated and the observed flying height adjustment is 2.3nm.
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