Abstract
In this paper, we report a flux-driven Josephson par-ametric amplifier (JPA) fabricated using the Nb/AlOx/Nb Josephson junction process. The JPA consists of a parallel-plate type coupling capacitor and quarter-wavelength resonator terminated with a DC-SQUID. We adopt a simple 4-layer process using well-estab-lished Nb trilayer technology. The overall configuration time of the Nb-based JPA can be shortened by measuring resonant frequency and its bias dependence in liquid helium. Amplification of the pre-tested device was demonstrated, showing a gain of 20 dB in a -3 dB bandwidth of 17 MHz in a 10 mK dilution fridge.
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