Abstract
Fluorine-doped zinc oxide (FZO) thin films were deposited by the aerosol-assisted chemical vapor deposition method with variable precursor flow rates (0.5–2.5 ml/min). X-ray diffraction patterns revealed the polycrystalline hexagonal wurtzite structure of the derived FZO nanocrystalline thin films. Extensive crystallinity analysis of the film deposited at 1 ml/min was done by grazing incidence X-ray diffraction. Field emission scanning electron microscope images apparent the gradual evolution from spherical grains and hexagonal platelet like surface morphology with increased flow rate. Optical transparency and photoluminescence (PL) are strongly influenced by flow rate. PL intensity and transparency increase with decreased flow rate. The optical bandgap was tuned significantly by increase in flow rate and especially tuned the PL emission from violet to UV. High intense violet PL observed at flow rate of 1 ml/min and radiative transition of electrons from zinc vacancies level to the conduction band were found. Crystallinity, growth rate and roughness increase with increased flow rate.
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