Abstract
To obtain low k materials with good comprehensive performances, fluorinated poly(aryl ether nitrile)s containing pendant cyclohexyl groups (FCPEN) have been designed and synthesized via nucleophilic aromatic substitution polymerization. The polymer exhibits excellent dielectric properties with a dielectric constant of 2.96 and a dielectric loss of 3.95 × 10-3 at at 1 MHz. Besides, FCPEN displays satisfactory thermostability with a 5% weight loss temperature (T d5%) of 489 °C and a glass transition temperature (T g) of 191 °C. The resultant film shows good mechanical performance and optical transmittance. The outstanding comprehensive properties indicate that FCPEN is a promising low k material for the fabrication of microelectronic devices used in 5G communication.
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