Abstract
Optical transmission and refractive indexes in vacuum ultraviolet (VUV) region are very important and provide basic data for lens systems in micro lithography equipments and substrate materials using F2 excimer laser as a lightsource. High purity multi-component fluoroberyllate glasses are promising candidates for the deep UV transmitting optical materials due to their exceptionally large optical band gaps compared to those of the other fluoride glass systems. The optimum glass composition for VUV glass material were introduced in terms of glass forming ability and VUV absorption of impurities in the glasses. We also measured refractive indexes of the glasses in VUV region. In order to predict the refractive index, we presented compositional parameter for fluoride glass based on our measured data.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
