Abstract
When the incident angle α of an X-ray beam (λ ≃ 1 A) on a surface is increased, the penetration depth changes from 30 A (α = 0.1°) to 10 μm (α ≃ 1°). The X-ray fluorescence observed is sensitive to the chemical composition of the irradiated layer. If the composition changes with the depth z (for example in the case of ionic implantation), the spectrum depends on α and the variation with α of the X-ray emission intensity of one of the elements is related to its concentration profile c(z). It is shown that c(z) can be determined with a layered-medium approximation. The profile thus obtained is in good agreement with that obtained by the destructive and heavy secondary ionic emission (SIMS) method. The same mathematical treatment can be used, from X-ray measurements, in order to determine other profiles (amorphization etc.).
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