Abstract
This paper proposes a novel bending sensor for flexible micro structures, especially Pneumatic Balloon Actuator (PBA) made of PDMS (polydi- methylsiloxan). Proposed sensor detects fluid resistance change depending on bending of fluidic structure. Structure of PBA with pneumatic channel is diverted to the fluid-resistive bending sensor without adding extra structure for sensor. Consequently, the proposed sensor has a perfect compatibility with PBA. A stiffness sensor is also designed by combining PBA and proposed bending sensor. 5 mm times 10 mm times 300 mum PDMS cantilever type stiffness sensor integrated with PBA and bending sensor could perform successfully. This paper describes the fluid-resistive bending sensor for flexible PBA and its application for stiffness sensor toward medical application.
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