Abstract
In this paper, fluidic microsystems based on an alternativefabricating technology are described. This technology mainly utilizes themanufacturing principles of printed circuit boards (PCBs). Minimal lateralstructure dimensions of approximately 100 µm und vertical dimensions ofsome 10 µm are feasible. By introducing thin polymeric foils (6-13 µmin thickness) into a stack of PCBs, movable parts forming active or passivevalves, pumps or sensors can be produced. The first results concerning severalfluidic components based on PCB technology are presented.
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