Abstract
A fluid model of a planar electron cyclotron wave resonance argon discharge is presented. The results for a 15-mtorr argon discharge are checked against the particle in cell/Monte Carlo (PIC/MC) simulation results by R. Krimke <i xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">et al</i> . and are also compared to the analytical theory and experimental data by B. Pfeiffer. The application of a specific boundary condition for the magnetic potential, the use of an effective electron collision frequency that includes plasma nonuniformities, and the coupled solution of the electrostatic field were found to be essential parameters leading to the agreement of the fluid code with both experimental and PIC/MC findings.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
