Fluid Flow Characteristics in Microchannels With Rib-Patterned Surface

Abstract

The effects of rib-patterned surfaces and surface wettability on liquid flow in microchannels were experimentally investigated in this study. Microchannels were fabricated on single-crystal silicon wafers by photolithographic and wet-etching techniques. Rib structures were patterned in the silicon microchannel, and the surface was chemically treated by trichlorosilane to create the hydrophobic condition. Experiments with water as the working fluid were performed with these microchannels over a wide range of Reynolds number between 110 and 1914. The results for the rib-patterned microchannels showed that the friction factor with the hydraulic diameter based on the rib-to-upper-wall height was lower than that for the incompressible theory with the same height. The friction factor-Reynolds number products for the hydrophobic condition increased as Reynolds number increased in the laminar flow regime. The experimental results were also compared with the predictive expressions from the literature, and it was found that the experimental data for the small rib/cavity geometry was in good agreement with those in the literature.