Fluid filter fabricated by deep X-ray lithography for micro fluidics

Abstract

A new method and fluid filter with micro through capillary array for high-throughput micro fluidics were proposed and fabricated. The method, utilizing liquid surface tension and directing fluid flow in vertical direction, was achieved by using the fluid filter we originally proposed. The computational fluid dynamics analysis was conducted to examine the feasibility of vertical fluid flow operation using the fluid filter. And the results indicated that the vertical fluid flow operation is useful and the good properties of the fluid filter. Fabrication of fluid filter was successfully conducted by using deep X-ray lithography. And vertical fluid flow operation and its high throughput properties were successfully demonstrated.