Abstract

The dry bias of MEMS humidity sensor induced by solar radiation heating seriously affects the accuracy of the relative humidity (RH) measurement. To solve this problem, this paper presents a novel numerical analysis method for the error correction of RH based on computational fluid dynamics (CFD). Firstly, considering the solar radiation, the distribution of temperature field of MEMS humidity sensor is simulated from the ground to 32km altitude by using CFD soft under the boundary condition of fluid-solid coupled heat transfer. Secondly, the numerical analysis model of RH is put forward for solar radiation dry bias (SRDB) correction based on the working principle of the MEMS capacitive humidity sensor and the definition of RH. The results of numerical analysis show that the error of RH caused by solar radiation is nonlinearly increased with the altitude. Meanwhile the errors decrease with the reflectivity of sensor or of solder point increase. The simulation data also indicate that the SRDB can be reduced by improving the reflectivity of sensor or of solder point, adopting the substrate material with high thermal conductivity or choosing the suitable thickness of sensor. However, the SRDB should be corrected, for it still is more than 20% under the low atmospheric pressure. In this paper, the method based on fluid dynamics simulation provides a new way to correct the error of radiosonde MEMS humidity measurement caused by solar radiation heating.

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