Abstract
The fluence- and temperature-dependence of the sputtering yield by 25 keV He +-ion bombardment were investigated for W and Nb targets. The sputtering yield of Nb and W increased and reached saturation levels as fluence was increased. The saturated sputtering yield Y of W did not depend on the target temperature T, whereas Y of Nb exhibited a maximum about 900 K. An effort was made to understand this Y temperature dependence by comparison of our experimental data with theoretical predictions.
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