Abstract
The flowability of fine powders can be improved by surface morphology modification. Therefore, SiOx-like nanoparticles were generated and attached to glass beads as a model substrate by plasma enhanced chemical vapor deposition (PECVD). A circulating fluidized bed (CFB) reactor with an integrated microwave plasma source was employed to realize the process. The surface of the treated substrate particles was analyzed by means of scanning electron microscopy (SEM). The size of the attached nanoparticles can be controlled by the operating pressure and the number of circulations of the CFB reactor. Nanoparticle diameters were determined in the range from 50 nm to 120 nm.
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