Abstract
Two optical probes, utilizing laser-induced biacetyl phosphorescence recorded by an image-intensified solid state camera, have been developed and used to characterize velocity fields in a low pressure chamber (similar to a plasma-enhanced CVD reactor). The method has been demonstrated at pressures as low as 0.5 Torr; measurements at lower pressures should be possible. Reactor flow velocity fields influence gas residence times and deposition rates. The method discussed in this paper can be used to investigate these effects.
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