Flow field-flow fractionation-inductively coupled plasma mass spectrometry of chemical mechanical polishing slurries

Abstract

Alumina- and silica-based chemical mechanical polishing slurries were analyzed to demonstrate the feasibility of field-flow fractionation-inductively coupled plasma mass spectrometry (FFF-ICP-MS). After FFF separation 27Al and 29Si were measured by ICP-MS to obtain size distributions, mean particle size, number average-, mass average-, Z average- diameters, minimum and maximum particle sizes, dominant particle size, and particle size ranges (breadth of size distribution, and polydispersity) characteristics. Five commercial alumina and 13 silica slurry samples were characterized. Broad distributions were detected and two polydispersity calculations were compared. Most silica samples and one alumina sample show monomodal normal distributions. Asymmetric distributions were observed for a few silica and most alumina slurries. The degree of deviation from normal distribution was assessed. Mean particle sizes of alumina slurries varied between 150 and 350 nm with the maximum detected particle of less than 680 nm. Silica slurries exhibited maximum particle sizes of less than approximately 400 nm with the mean particle sizes ranging from 110 to 220 nm. Trace metals (Fe, Ti and Zr) coeluted with Al, Si; whereas, Pb appeared to be present as colloidal fractions.