Abstract
A floating-type low-energy ion gun (FLIG) producing 100500 eV ions at a high current intensity has been developed. This ion gun consists of a permanent magnet-aided electron impact-type ionization cell, an extractor, and a cylindrical retarding immersion lens. The gun was assessed and produced typical performance levels of current intensities of 1.81 μA (current density of 7.9 μA/cm2) for 100 eV. The entire system has been compactly constructed with an ionization cell that has an outer diameter of less than 3.3 cm and a lens system that has a length of 24 cm. Conventional surface analytical instruments are attached via an ICF 70 Conflat flange.
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