Float Characteristics of Squeeze-Film Gas Bearing with Elastic Hinges for Linear Motion Guide.

Abstract

In this paper we describe the float characteristics of a new type of squeeze-film gas bearing which can be used to realize non-contact linear-motion guide systems which do not require supply of pressurized air. Piezoelectric actuators and elastic hinges are used to induce vibration of the bearing and generate squeeze-film pressure under the bearing. In a theoretical analysis, a simple dynamic model of the bearing structure is presented. The influences of the displacement and vibrational frequency of the piezoelectric atcuators on the float characteristics are investigated theoretically and experimentally. Furthermore, the load capacity at a vibrational frequency of 2400 Hz and the float characteristics at the resonance frequency of the bearing are measured. It was found that the bearing can be used to realize a non-contact linear motion guide and that the dynamic model presented in this paper can be used for accurate prediction of the float characteristics of the bearing.