Abstract
A piezoelectric gripper with force sensor is presented for an optical precision manipulation. The gripper utilizes flexure hinge mechanisms with two-step amplification to achieve output displacement. Micro displacement amplification principle of the gripper is analyzed and verified using finite element analysis (FEA) soft. A force sensor of resistance strain type with elastic plate structure of bi-cantilever is designed, which is fixed at the bottom of the gripper to detect force signals during the working process. The strain foils adopt a connecting method of full-bridge. According to theoretical analysis and FEA of the force sensor, bonding positions of the strain foils are determined. Experimental results indicate that the sensor has good linearity and little temperature drift and creep, and its resolution is less than 100mN. Micro-vision method is used to test the gripper, and maximum displacement is 302μm.
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