Flexible ZnO thin film acoustic wave device for gas flow rate measurement

Abstract

In this work, ZnO/Al thin film based flexible acoustic wave devices are demonstrated for their applications in gas flow rate measurements based on the changes in temperature of the devices. A good sensitivity of gas flow rate can be achieved, mainly because thin film based device has a large temperature coefficient of frequency of ∼280 ppm K−1, owing to the large coefficient of thermal expansion of aluminum foil. A heat source is used to enhance the sensitivity of the thin film device by introducing a temperature offset. The flexible acoustic wave device shows a high sensitivity, fast response times, and a good repeatability for measurement of the flow rate of nitrogen. When the flexible acoustic wave device is bent and attached onto the inner wall of a pipe, the device exhibits good performance for monitoring the gas flow rate, demonstrating its applications of flow rate measurement on curved or randomly shaped surfaces.