Abstract
Cutting of transparent materials is of great importance. In this study, JGS3 quartz glass is cut with laser stealth dicing (LSD) method. By loading computer generated hologram (CGH), a spatial light modulator (SLM) modulates a laser beam into ten coaxial beams along the depth direction. A human-in-the-loop feedback-weighted three-dimensional Gerchberg-Saxton (3D-GS) algorithm is utilized to improve its performance. The effectiveness of the algorithm is verified by CCD-captured energy distribution records. A noticeable improvement in multi-beam energy uniformity is realized. Additionally, an qualitative analysis is conducted to investigate the changes of laser beams inside the glass during LSD. Through flexible tuning of multi-focus spacing, the laser-diced surface roughness could be adjusted and optimized to ∼1 μm, paving the way for future advanced applications.
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