Abstract

Photoconversion of metal-organic precursors to thin film metal oxides using ultraviolet (UV) radiation in oxidative atmosphere is an attractive technology because it can be applied at temperatures < 80 °C and at ambient pressure. Thus, it enables preparing this class of thin films in a cost-efficient manner on temperature sensitive substrates such as polymer films. In this article, various aspects of research and development in the field of photochemical thin-film fabrication, with particular focus to the application of the produced films as gas permeation barriers for the encapsulation of optoelectronic devices are reviewed. Thereby, it covers investigations on fundamental photochemically initiated reactions for precursor classes containing metal-oxygen and metal-nitrogen bonds, and emphazises the relevance of that understanding for applicative considerations like integration of the single-layer barrier films into relevant encapsulation films. Further perspectives are given concerning integration of additional functionalities like electrical conductivity to the flexible and transparent barrier films.

Highlights

  • A variety of products, ranging from food to pharmaceuticals or electronic devices, have to be protected from gases present in the ambient atmosphere

  • Transparent and flexible polymer-based gas barrier materials are commercially available for the packaging of food and pharmaceuticals and have been comprehensively reviewed (Lange and Wyser, 2003)

  • Their target transmission rates are in the order of few cm3 m−2 d−1 bar−1 for oxygen (OTR—oxygen transmission rate), and few g m−2 d−1 for water vapor (WVTR)

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Summary

INTRODUCTION

A variety of products, ranging from food to pharmaceuticals or electronic devices, have to be protected from gases present in the ambient atmosphere. Transparent and flexible polymer-based gas barrier materials are commercially available for the packaging of food and pharmaceuticals and have been comprehensively reviewed (Lange and Wyser, 2003). Their target transmission rates are in the order of few cm m−2 d−1 bar−1 for oxygen (OTR—oxygen transmission rate), and few g m−2 d−1 for water vapor (WVTR). For those applications, intrinsically high barrier polymers incl.

Photochemical Preparation of Gas Barriers
Photoconversion of Silazane Thin Films
APPLICATION ASPECTS OF PHOTOCHEMICALLY DERIVED GAS PERMEATION BARRIERS
Gas Permeation Through Single Barrier Films
Optimizing Metal Oxide Barrier Films by Photoannealing
Treatment of precursor layer
Gas Permeation Through Multilayer Systems
Findings
Detection limit
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