Abstract
We report flexible thin-film lead zirconate titanate (PZT)-based ultrasonic transducers on polyimide substrates. The transducers are bar resonators designed to operate in the width extension mode. The active elements are 1 µm thick PZT films that were crystallized on Si substrates at 700 °C and transferred to 5 µm thick solution-cast polyimide via dissolution of an underlying release layer. Underwater pitch–catch testing between two neighboring 100 µm × 1000 µm elements showed a 0.2 mV signal at a 1.5 cm distance for a driving voltage of 5 V peak at 9.5 MHz. With the same excitation, a 33 kPa sound pressure output at a 6 mm distance and a 32% bandwidth at −6 dB were measured by hydrophone.
Highlights
There is growing demand for flexible, miniaturized, ultrasonic transducer devices in medical diagnostics and biometric authentication applications
Compared with conventional ultrasound technologies, such devices can conform to complex shapes and geometries, integrate with portable electronics operating at a low driving voltage, and access small apertures of imaging interest
Miniaturized ultrasonic transducer devices would be helpful in catheter-based ultrasound imaging technology, and would facilitate development of either forward-looking or side-looking imagers in which the transducer is wrapped around a central support ~1 mm in diameter
Summary
There is growing demand for flexible, miniaturized, ultrasonic transducer devices in medical diagnostics and biometric authentication applications. Wearable ultrasonic systems attached to the human body would enable more personalized and adaptive medical diagnoses and treatments, such as for neuromodulation [6] Another application of interest that would benefit from flexible transducers is finger vein detection. Development of piezoelectric thin-film-based ultrasonic transducers will enable this authentication technology to be integrated into more portable electronics, as well as allow a broader scope of applications. Inorganic piezoelectric thin films can be integrated with metallic foils or polymeric substrates for improved electromechanical responses while realizing mechanical flexibility. Because many of the inorganic piezoelectric materials require a crystallization temperature (e.g., PZT, Pb(Mg1/3 Nb2/3 )O3 -PbTiO3 , and BaTiO3 ) substantially higher than the thermal limit of most polymeric materials, thermally robust metallic foils provide some advantages for flexible device fabrication. Electrical connections were made by bonding flexible ribbon cables with anisotropic conductive films (ACFs)
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