Abstract
Lightweight, flexible and distributed-pixel piezoelectric sensors are desired in activity monitoring and human–machine interaction (HMI). In this work, a flexible P(VDF-TrFE) piezoelectric sensor array using ITO-coated PET substrate as the shared bottom electrode is demonstrated. The traditional array fabrication, which connects an individual sensor unit into an array, could easily lead to the signal discrepancy due to fabrication and assembly errors. To this end, this work introduces the shared ITO-coated-PET substrate and proposes a synchronous-fabrication method for generating the same thickness of every P(VDF-TrFE) sensor unit through a single spin coating. The designed Au top electrodes were sputtered on the spin-coated P(VDF-TrFE) to form the sensor array at one time without additional assembly step, further ensuring unit consistency. The performance of the cross-shaped sensor array was tested under cyclic compressing–releasing agitation. The results of the positive compression test show that our sensor array has a high consistency. Then, the cross-shaped array design that covers the central position is put forward, which realizes tactile sensing ability with a small number of units. Moreover, the fabricated flexible multi-pixel sensor has the advantage of sensitive identification of different contact scenes, and a recognition accuracy of 95.5% can be obtained in different types of hand touch through the machine learning technology.
Highlights
Nowadays, with the Internet-of-Things (IoT) and human–machine interaction (HMI) occupying an increasingly important position in our lives, smart sensors are playing an increasingly essential role in the fields of medical care, sports training and home entertainment
The flexible device was fixed on the ground, and a person performed different types of actions in place to make the heel with socks contact with the surface of the sensor array, including slow walking, fast walking, jogging, and jumping
Each sensor unit exhibits almost the same piezoelectric and output a clear and stable piezoelectric signal, Sensor which Array is beneficial for the motioned recognition scenarios
Summary
With the Internet-of-Things (IoT) and human–machine interaction (HMI) occupying an increasingly important position in our lives, smart sensors are playing an increasingly essential role in the fields of medical care, sports training and home entertainment. Chen et al manufactured a flexible 12 × 12 array of P(VDF-TrFE) tactile sensors, which was connected to a signal processing circuit to monitor the magnitude and distribution of real-time dynamic force on the contact surface [36]. This kind of tactile sensor array can sensitively detect the piezoelectric signal of each pixel unit, the extra alignments of electrodes and wires increase the complexity of the fabrication process and system. Tapping, whichthe proves the feasibility tactile monitoring function of the cross-shaped sensor array
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