Abstract
A novel flexible mixed-potential-type (MPT) sensor was designed and fabricated for NO2 detection from 0 to 500 ppm at 200 °C. An ultra-thin Y2O3-doped ZrO2 (YSZ) ceramic film 20 µm thick was sandwiched between a heating electrode and reference/sensing electrodes. The heating electrode was fabricated by a conventional lift-off process, while the porous reference and the sensing electrodes were fabricated by a two-step patterning method using shadow masks. The sensor’s sensitivity is achieved as 58.4 mV/decade at the working temperature of 200 °C, as well as a detection limit of 26.7 ppm and small response time of less than 10 s at 200 ppm. Additionally, the flexible MPT sensor demonstrates superior mechanical stability after bending over 50 times due to the mechanical stability of the YSZ ceramic film. This simply structured, but highly reliable flexible MPT NO2 sensor may lead to wide application in the automobile industry for vehicle emission systems to reduce NO2 emissions and improve fuel efficiency.
Highlights
Air pollution from car exhaust has caused plenty of environmental disasters in several countries and affected a large number of lives around the world due to the rapid development of the automobile industry [1,2]
To accurately and precisely monitor the NOX gases, especially NO2, from car exhaust in a harsh working environment with a high temperature and large vibration, a high-performance NO2 sensor was in high demand for vehicle emission systems to reduce NO2 emissions and improve vehicle fuel efficiency
A few NO2 sensors have been developed based on various sensing techniques, including metal oxide semiconductor sensing [5,6], infrared light absorption [7,8] and electrochemical reaction [9,10,11]
Summary
Air pollution from car exhaust has caused plenty of environmental disasters in several countries and affected a large number of lives around the world due to the rapid development of the automobile industry [1,2]. A few NO2 sensors have been developed based on various sensing techniques, including metal oxide semiconductor sensing [5,6], infrared light absorption [7,8] and electrochemical reaction [9,10,11] Among these sensors, one type of electrochemical NO2 sensor, mixed-potential-type (MPT) NO2 sensor based on Y2 O3 -doped ZrO2 (YSZ) solid electrolyte material, is widely investigated for a vehicle emission systems due to the sensor’s excellent chemical and thermal stability at high working temperatures [12,13]. The MPT NO2 sensor based on various sensing electrode materials has been developed to detect the electrochemical potential difference between the reference electrode layer and the NO2 Eventually, gas.
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