Flexible logic circuits based on top-gate thin film transistors with printed semiconductor carbon nanotubes and top electrodes.

Abstract

In this report printed thin film transistors and logic circuits on flexible substrates are reported. The top-gate thin film transistors were made of the sorted semiconducting single-walled carbon nanotubes (sc-SWCNTs) ink as channel material and printed silver lines as top electrodes and interconnect. 5 nm HfOx thin films pre-deposited on PET substrates by atomic layer deposition (ALD) act as the adhesion layers to significantly improve the immobilization efficiency of sc-SWCNTs and environmental stability. The immobilization mechanism was investigated in detail. The flexible partially-printed top-gate SWCNT TFTs display ambipolar characteristics with slightly strong p-type when using 50 nm HfO(x) thin films as dielectric layer, as well as the encapsulation layer by atomic layer deposition (ALD) at 120 °C. The hole mobility, on/off ratio and subthreshold swing (SS) are ∼ 46.2 cm(2) V(-1) s(-1), 10(5) and 109 mV per decade, respectively. Furthermore, partially-printed TFTs show small hysteresis, low operating voltage (2 V) and high stability in air. Flexible partially-printed inverters show good performance with voltage gain up to 33 with 1.25 V supply voltage, and can work at 10 kHz. The frequency of flexible partially-printed five-stage ring oscillators can reach 1.7 kHz at supply voltages of 2 V with per stage delay times of 58.8 μs. This work paves a way to achieve printed SWCNT advanced logic circuits and systems on flexible substrates.