Abstract
Flexible Contact Pressure Sensor based on Ultrathin Piezoresistive Silicon Membrane Capable of Strain Compensation
Highlights
In recent years, MEMS sensors have been utilized in various situations
To evaluate the fabricated flexible contact pressure sensor, the following three experiments were conducted: (I) piezoresistivity evaluation of fabricated ultrathin piezoresistive silicon membrane transferred onto the polyimide substrate; (II) response of the sensor to the contact pressure when the sensor is attached to a flat and a curved surface; and (III) measurement of the contact pressure with strain compensation when the sensor is fixed on a curved surface. 4.1 Piezoresistivity evaluation
The sensor was fixed on the surface of an acrylic pipe with a diameter of 5.5 cm as the curved surface, and contact pressure was applied to the sensor using a circular jig with a diameter of 10 mm so that both pressure and strain sensors can be simultaneously covered and pressure can be applied
Summary
MEMS sensors have been utilized in various situations. Since the MEMS sensors are small and lightweight, there is an increasing need to fix them on hard and flat surfaces and on soft and curved surfaces. The reason why the silicon wafer is 500 μm or thicker is that in the MEMS process, the flatness of the wafer is important to enable uniform processing Such a thickness is necessary to prevent the wafer from being deflected. For these reasons, it is difficult to realize a flexible pressure sensor using highly sensitive piezoresistive silicon. When a flexible sensor with piezoresistive silicon is fixed to a curved surface, the resistance changes owing to distortion. Since this resistance change continues to be added to the sensor output, there is the problem that it cannot be separated from the resistance change due to the strain caused by the contact pressure. From the output of these two sensors, strain caused by fixing the sensor to the curved surface can be compensated, so that we can accurately measure contact pressure even if the sensor is attached to a curved surface of arbitrary shape [Fig. 1(2)]
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