Abstract
This paper demonstrates a novel flexible carbon nanotubes (CNTs) electrode array for neural recording. In this device, the CNTs electrode arrays are partially embedded into the flexible Parylene-C film using a batch microfabrication process. Through this fabrication process, the CNTs can be exposed to increase the total sensing area of an electrode. Thus, the flexible CNTs electrode of low impedance is realized. In application, the flexible CNTs electrode has been employed to record the neural signal of a crayfish nerve cord for in vitro recording. The measurements demonstrate the superior performance of the presented flexible CNTs electrode with low impedance (11.07 kΩ at 1 kHz) and high peak-to-peak amplitude action potential (about 410 μV). In addition, the signal-to-noise ratio (SNR) of the presented flexible CNTs electrode is about 257, whereas the SNR of the reference (a pair of Teflon-coated silver wires) is only 79. The simultaneous recording of the flexible CNTs electrode array is also demonstrated. Moreover, the flexible CNTs electrode has been employed to successfully record the spontaneous spikes from the crayfish nerve cord. The amplitude of the spontaneous peak-to-peak response is about 25 μV.
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