Flexibility of the Indium Tin Oxide Transparent Conductive Film Deposited onto the Plastic Substrate

Abstract

In this study, we utilize the RF magnetron sputtering system to deposit the indium tin oxide (ITO) conductive transparent film with low resistivity and high light transmittance to the polyethylene tetephthalate (PET) plastic substrate and measure the film's bending property and reliability at different tensile/compressive strain bending curvatures as well as the flexibility after cycling bending. The results show that the critical curvatures corresponded to the significant increase in the resistance of the 150 nm-thick ITO film deposited onto the PET substrate under tensile and compressive stress areO 14.1 mm and 5.4 mm, respectively. By observing the film's surface crack and morphology, we can further discover that the critical curvature of the crack generated when the film is bent is quite consistent with the critical curvature at which the conductivity property degrades, and the film can withstand a higher compressive strain bending. In addition, the resistance and adhesion behavior of the film almost is unchanged after cycling bent for 1000 times with the curvature below the critical curvature.