Flat and highly flexible composite stamps for nanoimprint, their preparation and their limits

Abstract

To reduce the overall costs, replica stamps have become more and more relevant in the past years. These replicas often are composite stamps with at least two layers, a structured top layer and a backplane. In most cases, the composite stamps are rigid, which limits their use for rolling processes or low-pressure imprints. Flexible composite stamps avoid these limitations. However, due to the flexibility, preparation-induced bending may occur. A concept to avoid such a bending will be introduced and verified by the preparation of a flat and flexible composite stamp consisting of a structured OrmoStamp top layer and a polydimethylsiloxan (PDMS) backplane. To increase the adhesion between both layers, two measures will be adopted: one relies on an increase in the surface energy of the PDMS and the other one on an increase in the interface area. Finally, these flat and highly flexible composite stamps are tested in a critical imprint situation, where particles are dusted to the substrate before imprint. Imprint defects and stamp damage due to these particles will be examined.