Flash-based Field Programmable Gate Array Technology with Deep Trench Isolation

Abstract

A highly scalable flash-based Field Programmable Gate Array (FPGA) technology has been achieved with Deep Trench Isolation (DTI). The DTI allows for a reduced cell size and enables Independent Pwell (IPW) operation. The IPW allows the Fowler-Nordheim (FN) Uniform Channel Program and Erase (UCPE) with less than plusmn10 V. Additionally, the IPW approach allows a greater flexibility in the array bias scheme reducing the gate disturb during programming and eliminating all Gate-Induced Drain Leakage (GIDL) conditions. Characterization of a FPGA cell and 0.5 Mbit array with 90 nm design rules is demonstrated with excellent electrical characteristics.