Flash pyrolysis mechanism of trimethylchlorosilane

Abstract

The thermal decomposition mechanism of trimethylchlorosilane at temperatures up to 1400 K was investigated using flash pyrolysis microreactor coupled with vacuum ultraviolet (118.2 nm) photoionization time-of-flight mass spectrometry. The main initiation reaction of the parent molecule was identified to be HCl molecular elimination producing Me2Si=CH2, and its onset temperature was estimated to be around 1210 K. The methyl loss channel was also observed at an onset temperature of ∼1280 K. Other possible initiation pathways such as chlorine atom loss and methane molecular elimination were considered to be insignificant. Quantum chemistry calculations at the UCCSD(T)/cc-pVTZ//UM05–2X/aug-cc-pVDZ level of theory were performed to study the energetics of the possible initiation pathways. The theoretical calculations revealed that the HCl elimination channel via a van der Waals intermediate was the most energetically favored pathway among all the initiation channels, in agreement with the experimental observations. Transition state theory (TST) and variational transition state theory (VTST) calculations were employed to calculate unimolecular dissociation rate constants of the initiation reactions at elevated temperatures. The results supported the experimental observations and reaction energetics calculations that the HCl molecular elimination reaction was the most prominent initiation reaction and the CH3 loss channel was a significant initiation reaction channel. Secondary reactions of the initial products were identified, and the possible mechanisms were proposed.