Abstract
Abstract Large scale exfoliation formed by 300 keV He+ bombardment without any preceding blistering is investigated, in comparison with the blistering due to 450 and 850 keV Ne+ bombardments. In-situ observations of the erosion processes were performed in a scanning electron microscope connected to the Van de Graaff. Critical doses of 7.2 × 1017 He+ /cm2, 2.4 × 1017 Ne+/cm2 and 4.0 × 1017 Ne+/cm2 were obtained for the 300 keV He flaking, 450 keV Ne blistering and 850 keV Ne blistering, respectively. The He flaking was presumed to be due to brittle fashion peeling-off of the surface layer by the bending moment driven by the internal gas pressure. The blistering, on the other hand, was presumed to be the result of the ductile fashion spreading of the lenticular bubble in the sub-surcdce layer. The necessary pressure for the peeling-off of the cover was calculated, and was speculated to be able to work as the driving force for the flaking from its unexpectedly low values. Fractographies under the exfoliation...
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