Abstract
The aim of this research is to develop the active air rotary bearing (AARB) which has the following capability: (1) compensation of motion errors of the axis (high accuracy), (2) reduction of motion errors and residual vibrations which disturbances cause (high stiffness and high vibration damping) and (3) control of five degrees of freedom motion of the rotating axis (new function). The AARB is a control type air bearing which comprises an axis, nine non-contact actuators and five non-contact sensors. This paper describes, first, the principle and the dynamic models of the AARB. The AARB is expressed with five dynamic models of single degree of freedom. Then a control system with PID-PD controllers is designed to control the five degrees of freedom axis motion. By using the control system, the AARB achieves; (1) axis motion accuracy better than 21nm (x,y,z directions) and 0.03arcsec (φ, ψ directions) and (2) almost infinite static stiffness and increased damping capability.
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