Abstract
A software package for performing modelling and analysis of GISAXS (grazing-incidence small-angle X-ray scattering) data within the distorted-wave Born approximation has been developed using the IGOR Pro scripting language (http://www.wavemetrics.com). The tool suite uses a slab-model approach with the Abélès matrix method to calculate X-ray reflectivity curves, electric field intensity distributions and GISAXS intensities from supported or buried scatterers arranged in two or three dimensions in a stratified medium. Models are included to calculate the scattered intensity for monodisperse, polydisperse and interacting particles with various size distributions, form factors and structure factors. The source code for the entire package is freely available, allowing anyone to develop additional tools.
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