First X-ray fluorescence excited Kossel diffraction in SEM

Abstract

We present, for the first time, X-ray fluorescence excited Kossel patterns in the scanning electron microscope by way of a compact X-ray tube and a focusing polycapillary lens. Both the diffraction geometry in transmission and in back reflection can be carried out. The way is paved for the advantageous combination of micro-X-ray fluorescence analysis, the Laue method, and the X-ray fluorescence excited Kossel micro-diffraction with the high lateral resolution of the electron microscopy.