Abstract
In this paper, we show the possibility to deposit a CeO2 thick film on (111) silicon substrate from a suspension of CeO2 nanoparticles by a new process of thick layer deposition in order to realize a humidity sensor. This new technique is derived from the spin-coating technology. The suspension is based on ultra-fine grinding of CeO2 firstly in a stirred media mill coupled then in a sonication cell. Suspension viscosity has been adjusted with carbopol polymer and its rheological properties have been analyzed in order to cover completely the silicon substrate by the CeO2 layer. Then, the impact of a conventional annealing on the crystallinity of the CeO2 film has also been investigated by Raman spectroscopy and by scanning electron microscopy. Finally, gold interdigitated electrodes have been screen printed on the thick film surface in order to realize a sensor and first promising results on the humidity sensitivity have been highlighted.
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