Abstract
In this paper, a first-order closed-loop mechatronics model of a micro-electromechanical system (MEMS) disk resonator gyroscope (DRG) with a configurable ASIC is established for closed-loop design and performance analysis. There are usually some nonlinear modules in the gyroscope mechatronics model, and it is difficult to design the closed-loop controllers using classical automatic control theory. An order-reduction method (ORM) based on the Laplace transform and inverse Laplace transform is proposed to linearize the nonlinear modules. The linearized model is proved to show good agreement with the original mechatronics model in terms of system response. The experimental verification was conducted to demonstrate the validation of this method.
Highlights
The micro-electromechanical system (MEMS) disk resonator gyroscope (DRG) is a typical wine-glass mode gyroscope and it has become more favorable for high performance MEMS gyroscopes [1,2,3,4]
A lot of progress has been made on the disk resonator and DRG, including Q factor optimization [5,6,7,8], frequency tuning [9,10,11], resonator noise analysis and structure optimization [12,13,14,15], microcosmic dynamics analysis [16,17], nonlinear models of disk resonators [18,19], and fabrication processes [20,21]
The gyroscopic model with a2 of 19 modulator and a demodulator in the AGC loop and rebalance loop is linearized to a first‐order model, and the gyroscopic model with an oscillator and a phase detector in PLL is linearized to modelWith order-reduction method model, (ORM) the based on Laplace transform and inverse Laplace transform a gain the order‐reduction closed‐loop controller and systematic terms can be is proposed to linearize the mechatronics model
Summary
The micro-electromechanical system (MEMS) disk resonator gyroscope (DRG) is a typical wine-glass mode gyroscope and it has become more favorable for high performance MEMS gyroscopes [1,2,3,4]. It is of great significance to study how to determine these systematic parameters These factors of a closed-loop gyroscopic system, such as bandwidth, closed-loop scale factor, settling time, could be determined by the classical automatic control theory. In an original closed-loop MEMS gyroscope system, there are typically some nonlinear modules, such as the modulator, demodulator, oscillator, and phase detector, making it difficult to design closed-loop controllers and analyze performance terms using classical automatic control theory. A mechatronics model is established for a MEMS disk resonator gyroscope (DRG) with a configurable ASIC (Application Specific Integrated Circuit). (ORM) the based on Laplace transform and inverse Laplace transform a gain the order‐reduction closed‐loop controller and systematic terms can be is proposed to linearize the mechatronics model.
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