Finite Element Study on the Cylindrical Linear Piezoelectric Motor Micro Driven

Abstract

AbstractAs the chip packaging industry developed rapidly, high requirements are put forward for positioning accuracy, speed and acceleration of the packaging equipment at the same time. However, the increase of positioning accuracy and the speed are in conflict. This article puts forward to the structure of a new cylindrical piezoelectric linear motor consisted of macro and micro actuate with the character of piezoelectric actuator, on the basis of the organic combination of piezoelectric motor and piezoelectric micro actuator. In addition, it analyzes the working principle of piezoelectric motor, builds finite element model of piezoelectric linear motor microscopic actuate by using the finite element analysis software, carries on the static analysis and the sensitivity analysis of the structural parameters. Finally, it takes the largest static displacement of the micro drive of the composite vibrator as optimization objective function, redesigns the structure based on the optimization process, in order to letting the micro displacement of the linear motor get larger, which can lay the foundation for designing piezoelectric linear motor consisted of macro and micro actuate.Keywordspiezoelectric linear motormicro drivefinite element analysis Introduction