Finite-element modeling of the transient response of MEMS sensors

Abstract

The finite-element method of analysis is unrestricted by size considerations and is well suited for the study of very small structures such as MEMS devices embedded in structures. This paper presents the numerical approach and results for a silicon-based micro-flow sensor for pulsed-flow sensing. The new approach presented here is the treatment of transient problems. A finite-element formulation is presented for modeling the dynamic response of piezoelectric ceramic sensors embedded in a micro-cantilever subjected to mechanical loading resulting from fluid flow. An unconditionally stable method (called the -method) is used for the direct integration of the equations of motion and implicit - explicit procedures are used for the transient analysis of the linear system of equations. For verification of the code, the device is tested for step, rectangular pulse and sinusoidal loading. For the case of the micro-fluid flow sensor, numerical results are in good agreement with the available experimental data based on a piezoresistive sensor. The numerical approach presented here may be used in CAE models for microsensors under more realistic, transient excitation.