Abstract
This paper presents results of numerical analysis of dynamics of a microstructure under the influence of air damping, which is modeled by linearized compressible Reynolds equation. Developed finite element model accounts for air rarefaction and is valid in a wide pressure range. Simulation results indicate that the influence of air damping may result not only in a pronounced dissipative effect but also in natural frequency shift due to system stiffening caused by air compression. This phenomenon is observed under combination of particular values of system and excitation parameters
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