Finite element model for unified EB–PVD machine dynamics

Abstract

The present paper presents finite element models to describe machine dynamics, such as electron beam (EB) generation in an EB gun, EB scanning on the surface of an ingot, melting process of the ingot, and vaporisation and deposition on the surface of a substrate during EB–PVD process. Based on physical models, the finite element models relate the input power to the EB gun and the temperature profile of the ingot surface, the temperature profile to the shape of vapour plume, and the vapour distribution to the coating thickness. The two deposition process models have been investigated for predicting the coating thickness and compared to experiments performed for simple shaped substrates. With preliminary studies, it is found that the presented models are suitable for a cost efficient computation and can aid in assessing process parameters.