Abstract
For the temperature regulation in a rapid thermal processing system in semiconductor manufacturing, we develop an adaptive iterative learning controller based on the finite-element-method in this paper. A finite-dimensional model of the system is constructed by the finite-element-method firstly. Then, adaptive iterative learning controller is designed based on the finite-dimensional model. Simulations are performed by heating the wafer in the system with the developed control method. Simulation results show the effectiveness of the proposed adaptive iterative learning controller.
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