Abstract
ABSTRACTThe frequency dependence of scattering parameters of interdigital surface acoustic wave transducers placed on ferroelectric barium titanate (BaTiO3) epitaxial film in c-phase coated over magnesium oxide has been studied using the finite-element method (FEM) approach along with the perfectly matched layer (PML) technique. The interdigital transducer which has a comb-like structure with aluminum electrodes excites the mechanical wave. The distance between the fingers allows tuning the frequency properties of the wave propagation. The magnesium oxide is taken as the substrate. The two-dimensional model of two-port surface acoustic wave filter is created to calculate scattering parameters and to show how to design the fixture in COMSOLTM. Some practical computational challenges of finite element modeling of SAW devices in COMSOLTM are shown. The effect of lattice misfit strain on acoustic properties of heterostructures of BaTiO3 epitaxial film in c-phase at room temperature is discussed in present article for two low-frequency surface acoustic resonances.
Highlights
The devices on surface acoustic waves (SAW), which use interdigital electrodes, have a wide range of applications [1] in today’s telecommunication systems for real-time analog signals processing in the frequency range from about 10MHz to 10GHz and higher
It is mathematically equivalent to the resolution of partial differential equations (PDE) of piezoelasticity in the frequency domain with a given excitation by finite-element method (FEM)
The numerical finite-element formulation of the direct FEM used for the full-scale analysis of electromechanical phenomena involved in SAW devices is discussed in [14]
Summary
The devices on surface acoustic waves (SAW), which use interdigital electrodes, have a wide range of applications [1] in today’s telecommunication systems for real-time analog signals processing in the frequency range from about 10MHz to 10GHz and higher. They are extensively used as filters, delay lines, convolvers, resonators, wireless identification systems (ID tags), etc. The model is used to obtain numerical results for S-parameters in the frequency domain of heterostructures of BaTiO3 epitaxial film in c-phase at room temperature for two low-frequency surface acoustic resonances. The effect of lattice misfit strain on S-parameters is discussed
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