Abstract
We present finite element analysis of the deflections of clamped, ultrathin single crystals under electrostatic pressure. The crystals form concave mirrors that are suitable for low-aberration reflective focusing of inert atom beams, such as those required for the construction of a scanning helium microscope. The electrostatic and elastic aspects of the problem are coupled in the simulation. Additionally, realistic inhomogeneities in the crystal thickness are considered and it is shown that adaptive optic protocols using a minimal number of optimized electrodes can correct the resultant mirror aberrations.
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