Abstract
The most vital step in the development of novel and existing surface acoustic wave (SAW)-based sensors and transducers is their design and optimization. Demand for SAW devices has been steadily increasing due to their low cost, portability, and versatility in electronics, telecommunications, and biosensor applications. However, a full characterization of surface acoustic wave biosensors in a three-dimensional (3D) finite element model has not yet been developed. In this study, a novel approach is developed for analyzing shear horizontal Love wave resonator devices. The developed modeling methodology was verified using fabricated devices. A thorough analysis of the 3D model and the experimental device was performed in this study including scattering parameters (S-parameters), reflection coefficient parameters, transmission parameters, and phase velocity. The simulated results will be used as a design guideline for future device design and optimization, which has thus far resulted in close matching between prediction and experimental results. This manuscript is the first to demonstrate a 3D finite element model to correlate the sensitivity of the SAW device with the magnitude of the phase shift, the real and imaginary part of the response, insertion loss, and the frequency shift. The results show that the imaginary part of the response shift has a higher sensitivity compared to other parameters.
Highlights
Surface acoustic wave (SAW)-based devices have been mass-produced and widely used in consumer products and communication equipment [1]
All simulation models were based on 36◦ YX cut lithium tantalate substrates, employed the commercially available finite element analysis package (COMSOL Multiphysics 5.2), and were analyzed in Matlab©
We developed and evaluated a novel approach for characterizing and analyzing the surface acoustic wave (SAW)-based resonator device
Summary
Surface acoustic wave (SAW)-based devices have been mass-produced and widely used in consumer products and communication equipment [1]. The increasing demand for fast and precise simulation tools is driven by their essential role in research and development The advantages of these tools include reduced time and cost for production as well as improved design optimization and a better understanding of the underlying Multiphysics [2]. Due to their high sensitivity and great portability [3], SAW devices can be utilized in a wide range of applications including electronic actuators [4,5], telecommunication modulators [6,7], as well as biochemical and gas sensors [8,9,10,11,12]. The most effective methods are Sensors 2019, 19, 1749; doi:10.3390/s19081749 www.mdpi.com/journal/sensors
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