Abstract

<dm:abstracts xmlns:dm="http://www.elsevier.com/xml/dm/dtd"><ce:abstract xmlns:ce="http://www.elsevier.com/xml/common/dtd" view="all" class="author" id="aep-abstract-id5"><ce:section-title>Publisher Summary</ce:section-title><ce:abstract-sec view="all" id="aep-abstract-sec-id6"><ce:simple-para id="fsabs008" view="all">Surface preparation is critical to the nucleation and interface formation steps of the coating process, and is an essential step in all vacuum coating processes. Surface preparation includes not only cleaning but, in some cases, modification of the chemical, morphological, or mechanical properties of the surface or the near-surface region. A few external cleaning techniques have been developed specifically for vacuum coating or were initially used for vacuum coating. These include ultraviolet-ozone oxidative cleaning and sputter (physical) cleaning. Recontamination of surfaces in the deposition chamber can be a major problem. In addition to the obvious problems of backstreaming, flaking, and wear particles, particles can be formed by vapor-phase nucleation of the vaporized material. The preparation of “vacuum surfaces” in the deposition chamber is important in generating a clean vacuum environment rapidly. Stripping and reclamation of substrates, fixtures, and liners can be important to economical vacuum coating. Dispersion hardening is done in vacuum by ion implantation of one or several species or in plasma by ion bombardment and heating by reactive species.</ce:simple-para></ce:abstract-sec></ce:abstract></dm:abstracts>

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