Abstract
The applicability of the field ionization source for microprobe use is under investigation with a differentially pumped high-pressure source and an electrostatic optical column. Resolution of 6500 Å with greater than 50 pA hydrogen current and approximately 2000 Å with 20 pA Ar current have been achieved, using polycrystalline Ir emitters. Single-crystal 〈110〉 Ir emitters can be built up in a manner similar to 〈100〉 oriented W to reproducibly yield high current on axis with good angular confinement of the ion beam, as opposed to the poor confinement and difficult-to-reproduce results obtained with polycrystalline Ir.
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