Final Report Spacially-Resolved Diagnostics and Modeling of Micro-Discharges

Abstract

Optical emission spectroscopy measurements were performed with added trace probe gases in an atmospheric pressure direct current (DC) helium microplasma. Spatially resolved measurements (resolution {approx} 6 {micro}m) were taken across a 200 {micro}m slot-type discharge. Stark splitting of the hydrogen Balmer-line was used to investigate the electric field distribution in the cathode sheath region. Electron densities were evaluated from the analysis of the spectral line broadenings of H-{beta} emission. The electron density in the bulk plasma was in the range 3-8 x 1013 cm-3. The electric field peaked at the cathode ({approx}60 kV/cm) and decayed to small values over a distance of {approx} 50 {micro}m (sheath edge) from the cathode. These experimental data were in good agreement with a self-consistent one-dimensional model of the discharge. The dependence of gas temperature on gas flow through the slot-type, atmospheric pressure microplasma in helium or argon was investigated by a combination of experiments and modeling. Spatially-resolved gas temperature profiles across the gap between the two electrodes were obtained from rotational analysis of N{sub 2} (C{sup 3}II{sub u} {yields} B{sup 3} II{sub g}) emission spectra, with small amounts of N{sub 2} added as actinometer gas. Under the same input power of 20 kW/cm{sup 3}, more » the peak gas temperature in helium ({approx}650 K) was significantly lower than that in argon (over 1200 K). This reflects the much higher thermal conductivity of helium gas. The gas temperature decreased with increasing gas flow rate, more so in argon compared to helium. This was consistent with the fact that conductive heat losses dominate in helium microplasmas, while convective heat losses play a major role in argon microplasmas. A plasma-gas flow simulation of the microdischarge, including a chemistry set, a compressible Navier-Stokes (and mass continuity) equation, and a convective heat transport equation, was also performed. Experimental measurements were in good agreement with simulation predictions. Finally, laser scattering experiments were performed at pressures of 100s of Torr in argon or nitrogen. Laser Thomson Scattering (LTS) and Rotational Raman Scattering were employed in a novel, backscattering, confocal configuration. LTS allows direct and simultaneous measurement of both electron density (ne) and electron temperature (Te). For 50 mA current and over the pressure range of 300-700 Torr, LTS yielded Te = 0.9 {+-} 0.3 eV and ne = (6 {+-} 3) 1013 cm-3, in reasonable agreement with the predictions of a mathematical model. Rotational Raman spectroscopy (RRS) was employed for absolute calibration of the LTS signal. RRS was also applied to measure the 3D gas temperature (Tg) in nitrogen DC microdischarges. In addition, diode laser absorption spectroscopy was employed to measure the density of argon metastables (1s5 in Paschen notations) in argon microdischarges. The gas temperature, extracted from the width of the absorption profile, was compared with Tg values obtained by optical emission spectroscopy. « less